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Part of Tessera's DigitalOptics family of Diffractive Optical Elements (DOEs), illumination solutions are photolithography fabricated, controlled-angle diffusers that are used in the illumination systems of high-performance semiconductor manufacturing and inspection tools.
Designed to meet unique customer specifications, these illumination system solutions receive input from a collimated beam. At the element, light is diffracted into a defined angular distribution to create a far field output pattern. The use of controlled-angle diffusers enables optimum illumination of masks – minimizing feature size and maximizing the operating process window for the tool. As a result, semiconductor manufacturers can produce higher performance chips at a higher yield. Tessera DOEs are integrated in the illumination systems of process control equipment to shape and control the beam for high accuracy inspection requirements. |