Part of Tessera's DigitalOptics family of Diffractive Optical Elements (DOEs), Aurora illumination solutions are photolithography fabricated, controlled-angle diffusers that are used in the illumination systems of high-performance semiconductor manufacturing and inspection tools.

Designed to meet unique customer specifications, these illumination system solutions receive input from a collimated beam. At the element, light is diffracted into a defined angular distribution to create a far field output pattern. The use of controlled-angle diffusers enables optimum illumination of masks – minimizing feature size and maximizing the operating process window for the tool. As a result, semiconductor manufacturers can produce higher performance chips at a higher yield. Tessera DOEs are integrated in the illumination systems of process control equipment to shape and control the beam for high accuracy inspection requirements.

Please view our  DigitalOptics Illumination System Solutions flyer

For more information on Micro-Optics solutions, please click the button and complete the attached form.